Description

Tetramethyldisilane is a highly reactive organosilicon compound primarily used as a key precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. Its value lies in its ability to introduce silicon-carbon frameworks into advanced materials, enabling precise thin-film engineering. This product is essential for manufacturers and R&D facilities in the semiconductor, photovoltaic, and specialty chemical sectors seeking to develop next-generation electronic and optical coatings.

Application

• Semiconductor Manufacturing: As a silicon source for CVD/ALD processes to deposit silicon carbide (SiC) or silicon-carbon-nitride (SiCN) thin films for diffusion barriers and low-k dielectrics.
• Photovoltaics & Optoelectronics: Precursor for the synthesis of amorphous silicon-carbon alloys used in solar cells and light-emitting devices.
• Specialty Polymer Synthesis: Serving as a monomer or cross-linking agent for producing polysilane and polycarbosilane polymers with unique thermal and electronic properties.
• Surface Functionalization: Used to modify material surfaces with organic silyl groups to alter wettability, adhesion, or chemical resistance.
• Research & Development: A fundamental building block in organometallic chemistry and materials science for creating novel silicon-based molecular structures.
• Ceramic Precursor: Pyrolyzed to produce silicon carbide ceramics and fibers for high-temperature and structural applications.

Basic Information

Product Name	Tetramethyldisilane
CAS No.	74645-91-3
Molecular Formula	C4H14Si2
Molecular Weight	118.33 g/mol
Synonyms	1,1,2,2-Tetramethyldisilane; Disilane, 1,1,2,2-tetramethyl-; Hexahydro-1,1,2,2-tetramethyldisilane; TMDS; Tetramethyl disilane
EINECS	Contact for details

Quality Control

Our Tetramethyldisilane is produced and handled under stringent quality management systems to ensure batch-to-batch consistency and high purity for sensitive deposition processes. Each lot is analyzed using advanced chromatographic and spectroscopic techniques. A comprehensive Certificate of Analysis (COA) detailing purity, identity, and impurity profiles is provided with every shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Store under an inert atmosphere (e.g., nitrogen or argon) in a cool, dry, well-ventilated area, away from heat sources and oxidizing agents. Due to its highly volatile and easily oxidized nature, the container must be kept sealed and handled under controlled conditions to prevent decomposition and maintain product integrity.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Purity (GC)	≥ 98.0%
Water Content (KF)	≤ 0.1%
Non-volatile Residue	≤ 0.05%

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.