Description

Tantalum(V) Methoxide is a high-purity metal-organic compound, also known as tantalum methoxide or tantalum pentamethoxide. This organotantalum precursor is critical for depositing high-performance tantalum oxide (Ta₂O₅) thin films with exceptional dielectric properties. It is essential for manufacturers in the semiconductor, optical coating, and advanced ceramics industries seeking precise, high-quality material vapor deposition.

Application

• Chemical Vapor Deposition (CVD) & Atomic Layer Deposition (ALD): A key precursor for depositing uniform, high-k tantalum oxide dielectric films in semiconductor devices and memory chips.
• Optical Thin Films: Used to create anti-reflective coatings, interference filters, and other optical layers on lenses and precision glass components.
• Sol-Gel Processing: Serves as a starting material for synthesizing advanced tantalum-based ceramics, nanoparticles, and mixed-metal oxides.
• Catalysis Research: Employed as a catalyst or catalyst precursor in specialized organic synthesis and polymerization reactions.
• Specialty Coatings: Applied to create corrosion-resistant or protective coatings on sensitive metal substrates.

Basic Information

Product Name	Tantalum(V) Methoxide
CAS No.	865-35-0
Molecular Formula	Ta(OCH₃)₅ or C₅H₁₅O₅Ta
Molecular Weight	336.15 g/mol
Synonyms	Tantalum Pentamethoxide; Tantalum Methoxide; Pentamethoxytantalum; Tantalum(V) Methoxide; Tantalum Methylate; Ta(OCH3)5; Tantalum methoxide (Ta(OMe)5)
EINECS	212-746-5

Quality Control

Our Tantalum(V) Methoxide is produced and handled under strict quality management protocols to ensure batch-to-batch consistency and high purity. Each lot is analyzed to confirm identity, assay, and impurity profiles. A comprehensive Certificate of Analysis (COA) detailing specific results is provided with every shipment. We support compliance with relevant industry standards for electronic and high-purity chemical materials.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, and well-ventilated area at room temperature (15-25°C). This material is hygroscopic (moisture-sensitive) and must be handled under an inert atmosphere (e.g., nitrogen or argon) to prevent decomposition.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid or solid
Identification (IR)	Conforms
Assay (Ta basis)	≥ 99.9%
Purity (GC)	≥ 99.5%
Metallic Impurities (ICP-MS)	≤ 100 ppm total
Chloride (Cl)	≤ 50 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.