Description

Zirconium Bis(Hexamethyldisilazide)Dichloride is a highly reactive organometallic compound primarily used as a precursor in advanced materials synthesis. This compound is valued for its role in depositing high-purity zirconium-containing films and facilitating specific chemical transformations. It is essential for researchers and manufacturers in the semiconductor, specialty chemical, and advanced ceramics industries who require precise metal-organic precursors for vapor deposition processes or as catalysts.

Application

• Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD): A key precursor for depositing zirconium oxide (ZrO₂) and zirconium nitride (ZrN) thin films for semiconductor gate dielectrics and protective coatings.
• Catalysis: Acts as a catalyst or catalyst precursor in organic synthesis, particularly for polymerization reactions and the formation of silicon-nitrogen bonds.
• Materials Science Research: Used in the development of novel metal-organic frameworks (MOFs), hybrid materials, and nanocomposites.
• Specialty Polymer Synthesis: Employed as an initiator or co-catalyst in the production of specialized polymers with tailored properties.
• Surface Modification: Facilitates the functionalization of material surfaces to alter wettability, adhesion, or chemical resistance.

Basic Information

Product Name	Zirconium Bis(Hexamethyldisilazide)Dichloride
CAS No.	70969-28-7
Molecular Formula	C₁₂H₃₆Cl₂N₂Si₄Zr
Molecular Weight	508.88 g/mol
Synonyms	Bis(hexamethyldisilazido)dichlorozirconium(IV); Dichlorobis(hexamethyldisilazido)zirconium; Zirconium(IV) bis(hexamethyldisilazide) dichloride; Zr(HMDS)₂Cl₂; Zr[N(SiMe₃)₂]₂Cl₂; Zirconium bis(N,N-bis(trimethylsilyl)amide) dichloride
EINECS	Contact for details

Quality Control

Our Zirconium Bis(Hexamethyldisilazide)Dichloride is manufactured and handled under stringent quality protocols to ensure batch-to-batch consistency and high purity for sensitive applications like semiconductor fabrication. Each lot is analyzed to confirm identity, purity, and the absence of critical metallic impurities. A comprehensive Certificate of Analysis (COA) detailing specifications and test results is provided with every shipment.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, and well-ventilated area. Due to its hygroscopic (moisture-sensitive) nature, this product must be handled and stored under an inert atmosphere (e.g., argon or nitrogen) to prevent decomposition. Recommended long-term storage temperature is 2-8°C.

Specification

Item	Specification
Appearance	White to off-white crystalline solid or powder
Identification (IR)	Conforms to structure
Assay (Zr content)	≥ 95.0%
Purity (NMR)	≥ 97.0%
Chloride Content	Theoretical

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.