Description

Tetrakis(Dimethylamino)Zirconium (CAS NO 17828-33-0) is a highly reactive organometallic compound that serves as a versatile precursor for depositing zirconium-containing films. This material is critical for applications demanding high-purity zirconium nitride or oxide layers with excellent conformality and step coverage. It is primarily needed by manufacturers in the semiconductor, optical coating, and advanced ceramics industries for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes.

Application

• Semiconductor Manufacturing: As a key precursor for the ALD/CVD of zirconium nitride (ZrN) diffusion barriers and zirconium oxide (ZrO₂) high-k dielectric gate layers.
• Optical & Protective Coatings: For depositing hard, wear-resistant zirconium-based coatings on lenses, cutting tools, and aerospace components.
• Advanced Ceramics & Composites: As a molecular source for synthesizing zirconium carbide (ZrC) or doping other ceramic matrices to enhance thermal and mechanical properties.
• Catalyst Synthesis: Serving as a reactive intermediate or supporting material in the preparation of specialized heterogeneous catalysts.
• Research & Development: Used in academic and industrial labs for developing new materials via vapor-phase deposition techniques.

Basic Information

Product Name	Tetrakis(Dimethylamino)Zirconium
CAS No.	17828-33-0
Molecular Formula	C8H24N4Zr
Molecular Weight	291.51 g/mol
Synonyms	Zirconium(IV) tetrakis(dimethylamide); Zirconium tetrakis(dimethylamide); Tetrakis(dimethylamido)zirconium(IV); TDMZ; TDMAZ; Zr(NMe2)4; Zirconium dimethylamide; Zirconium tetradimethylamide
EINECS	Contact for details

Quality Control

Our Tetrakis(Dimethylamino)Zirconium is produced and handled under stringent quality management protocols to ensure batch-to-batch consistency and high purity suitable for demanding deposition processes. Each lot is analyzed to confirm critical parameters such as metal content and impurity profiles. Certificates of Analysis (COA) detailing specific results are provided with every shipment. We support customer audits and can tailor specifications to meet the requirements of ISO, semiconductor (SEMI), or other relevant industry standards.

Storage

Preserve in a tightly closed container, protected from light. This product is highly volatile, easily oxidized, and sensitive to strong bases and organic solvents. For long-term stability, store under a dry, inert atmosphere (argon or nitrogen) at temperatures between 2°C and 8°C. Keep away from heat, sparks, and open flames. Allow the container to reach room temperature before opening to prevent moisture condensation.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms
Assay (Zr content)	≥ 99.9%
Purity (GC)	≥ 99.5%
Density (at 20°C)	~1.12 g/cm³
Volatile Metals (ICP-MS)	< 10 ppm total
Chloride (Cl) Content	< 50 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.