Description

Tetrakis(Diethylamino)Zirconium is a highly reactive organometallic compound that serves as a versatile precursor for advanced materials synthesis. Its value lies in its ability to deposit high-purity zirconium-containing films and act as a catalyst or reagent in specialized organic transformations. This product is essential for manufacturers and R&D facilities in the semiconductor, specialty chemical, and advanced ceramics industries seeking precise and reliable zirconium sources.

Application

• Chemical Vapor Deposition (CVD) & Atomic Layer Deposition (ALD): A key precursor for depositing zirconium oxide (ZrO₂) high-k dielectric films in semiconductor manufacturing and for creating zirconium nitride (ZrN) coatings.
• Sol-Gel Processing: Used in the synthesis of zirconia-based sols for producing advanced ceramics, optical coatings, and nanoparticles with controlled porosity.
• Catalysis: Acts as a catalyst or catalyst precursor in organic synthesis, including polymerization reactions and the formation of carbon-heteroatom bonds.
• Surface Modification: Employed to functionalize material surfaces with zirconium-containing groups to alter wettability, adhesion, or chemical resistance.
• Polymer Additive: Can be utilized as a cross-linking agent or stabilizer in the production of specialized polymers and resins.
• Research & Development: Serves as a fundamental reagent in academic and industrial labs for developing new materials and chemical processes.

Basic Information

Product Name	Tetrakis(Diethylamino)Zirconium
CAS No.	13801-49-5
Molecular Formula	C16H40N4Zr
Molecular Weight	387.73 g/mol
Synonyms	Zirconium(IV) diethylamide; Zirconium tetra(diethylamide); Tetra(diethylamido)zirconium(IV); TDEAZ; Zr(NEt2)4; Zirconium tetrakis(diethylamide); Zirconium tetraethylamide; Diethylaminozirconium
EINECS	Contact for details

Quality Control

Our Tetrakis(Diethylamino)Zirconium is produced and handled under stringent conditions to ensure batch-to-batch consistency and high purity for demanding applications like semiconductor fabrication. Quality is verified through a comprehensive suite of analytical techniques. A Certificate of Analysis (COA) detailing purity, identity, and impurity profiles is provided with each shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Due to its highly volatile and easily oxidized nature, this material must be stored under an inert atmosphere (argon or nitrogen) in a cool, dry, and well-ventilated area. Recommended storage temperature is 2-8°C to maintain stability. Keep away from heat, sparks, open flames, and strong oxidizing agents.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms
Assay (Zr content)	≥ 98.0 %
Purity (GC)	≥ 97.0 %
Density (at 20°C)	~1.05 g/cm³
Volatile Matter	< 1.0 %
Chloride (Cl) Content	< 100 ppm
Metallic Impurities (ICP-MS)	Contact for details

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.