Description

Tetrakis(Trimethylsiloxy)Zirconium is a highly reactive organosilicon zirconium compound, serving as a versatile precursor for advanced materials. Its core value lies in its ability to introduce zirconium and silicon functionalities in a single molecule, enabling precise control over material properties. This compound is essential for researchers and manufacturers in the semiconductor, specialty polymer, and advanced ceramics industries seeking to develop high-performance coatings and inorganic-organic hybrid materials.

Application

• Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD): A key precursor for depositing high-purity zirconium silicate (ZrSiO₄) or zirconium oxide (ZrO₂) thin films on semiconductor wafers for gate dielectrics and diffusion barriers.
• Advanced Ceramics and Sol-Gel Processing: Used to synthesize zirconia-silica composites and hybrid organic-inorganic materials with tailored thermal, mechanical, and optical properties.
• Specialty Polymer Catalysis and Cross-linking: Acts as a catalyst or co-catalyst in polymerization reactions and as a cross-linking agent for silicone-based polymers to enhance thermal stability.
• Surface Modification and Adhesion Promotion: Applied as a coupling agent to modify surface properties of fillers (e.g., silica, glass) for improved dispersion and adhesion in composite materials.
• Research & Development: A valuable reagent in academic and industrial R&D for exploring new metal-organic frameworks (MOFs), catalysts, and nanostructured materials.

Basic Information

Item	Details
Product Name	Tetrakis(Trimethylsiloxy)Zirconium
CAS No.	18623-00-2
Molecular Formula	C₁₂H₃₆O₄Si₄Zr
Molecular Weight	467.98 g/mol
Synonyms	Zirconium(IV) tetrakis(trimethylsiloxide); Tetrakis(trimethylsilanolato)zirconium; Zirconium tris(trimethylsiloxide); Zirconium tetrakis(trimethylsilyloxide); Zr(OTMS)₄; TMS-Zirconate; Zirconium trimethylsilanolate; Zirconium siloxide complex
EINECS	Contact for details

Quality Control

Our Tetrakis(Trimethylsiloxy)Zirconium is produced and handled under stringent quality management protocols. Each batch undergoes rigorous analytical testing, including assay and impurity profiling, to ensure high purity and consistent performance for critical applications like semiconductor fabrication. A comprehensive Certificate of Analysis (COA) detailing purity, identity, and specific test results is provided with every shipment to guarantee traceability and compliance with your technical requirements.

Storage

Preserve in a tightly closed container, protected from light. Due to its highly volatile, hygroscopic, and easily oxidized nature, this material must be stored under a dry, inert atmosphere (argon or nitrogen) in a cool, well-ventilated area. Recommended storage temperature is 2-8°C to maximize shelf-life stability. Containers must be kept sealed and allowed to reach room temperature before opening to prevent moisture condensation.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Assay (Zr content)	≥ 95.0%
Purity (GC or NMR)	≥ 90.0%
Density (at 20°C)	~1.0 g/mL

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.