Description

Trisilane CAS NO 7783-26-8 is a highly volatile, pyrophoric silicon hydride compound that serves as a critical precursor in advanced material synthesis. Its value lies in its ability to deposit high-purity silicon films at lower temperatures compared to monosilane, enabling more efficient and precise manufacturing processes. This product is essential for industries focused on semiconductor fabrication, photovoltaic cell production, and nanotechnology research, where controlled silicon deposition is paramount for device performance and yield.

Application

• Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD): As a key silicon source gas for depositing ultra-thin, high-quality amorphous or nanocrystalline silicon films on substrates.
• Semiconductor Manufacturing: For the production of advanced microelectronic components, including gate dielectrics, diffusion barriers, and interlayer dielectrics.
• Photovoltaics: Used in the fabrication of thin-film silicon solar cells to enhance light absorption and conversion efficiency.
• Nanotechnology & Nanomaterials: Enables the synthesis of silicon nanoparticles, nanowires, and quantum dots for optoelectronic and biomedical applications.
• Specialty Glass & Coatings: For creating silicon-based protective or functional coatings on optical and mechanical components.
• Research & Development: Serves as a fundamental reagent in organosilicon chemistry and materials science research for developing new silicon-containing compounds.

Basic Information

Product Name	Trisilane
CAS No.	7783-26-8
Molecular Formula	Si3H8
Molecular Weight	92.32 g/mol
Synonyms	Silicon Hydride (Si3H8); Trisilicon Octahydride; Disilanyl Silane; Hydrogen Trisilanide; Cyclotrisilane; Silicon Hydride Gas; SiH3SiH2SiH3; Triatomic Silicon Hydride
EINECS	Contact for details

Quality Control

Our Trisilane is produced and handled under stringent conditions to ensure the highest purity and consistency required for sensitive electronic applications. Each batch undergoes rigorous analytical testing, including gas chromatography (GC) and mass spectrometry (MS), to verify composition and impurity profiles. A Certificate of Analysis (COA) detailing specific purity levels, typically exceeding 99.9% (electronic grade), and critical impurity limits (e.g., oxygen, moisture, metal ions) is provided with every shipment to ensure traceability and compliance with your technical specifications.

Storage

Preserve in a tightly closed container, protected from light. Due to its highly volatile and easily oxidized nature, this product must be stored under an inert atmosphere (e.g., argon or nitrogen) in a cool, well-ventilated area, away from heat, ignition sources, and oxidizing agents. For long-term stability, storage at sub-ambient temperatures is recommended. Containers must be kept upright and securely sealed.

Specification

Item	Specification
Appearance	Colorless gas / liquid under pressure
Identification (IR)	Conforms
Assay (GC)	≥ 99.9% (Electronic Grade)
Oxygen (as O2)	≤ 10 ppm
Moisture (H2O)	≤ 5 ppm
Total Metallic Impurities	≤ 1 ppm
Chloride (Cl)	≤ 5 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.