Description

T-Amylimidotris(Dimethylamido)Tantalum(V) Taimata is a high-purity organometallic precursor compound used in advanced material deposition processes. This compound is critical for depositing ultra-thin, high-quality tantalum nitride (TaN) and tantalum oxide (Ta₂O₅) films with exceptional conformity and electrical properties. It is primarily required by manufacturers in the semiconductor and microelectronics industries for atomic layer deposition (ALD) and chemical vapor deposition (CVD) applications to produce next-generation integrated circuits and memory devices.

Application

• Semiconductor Fabrication: As a key precursor for the Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) of tantalum-based diffusion barriers and gate dielectrics in advanced logic and memory chips.
• Thin Film Coatings: For depositing high-k dielectric tantalum oxide (Ta₂O₅) films in capacitors and other passive electronic components.
• Optoelectronics: Used in the production of optical waveguides and anti-reflective coatings due to the high refractive index of resulting films.
• Surface Engineering: Application in creating hard, wear-resistant, and corrosion-resistant tantalum nitride coatings on precision tools and components.
• Research & Development: Serves as a vital reagent in academic and industrial R&D for exploring new metal-organic frameworks (MOFs) and catalytic systems.
• Solar Cell Technology: Investigation into its use for depositing efficient charge transport layers in perovskite and other novel photovoltaic cells.

Basic Information

Product Name	T-Amylimidotris(Dimethylamido)Tantalum(V) Taimata
CAS No.	629654-53-1
Molecular Formula	C₁₇H₄₂N₇Ta
Molecular Weight	503.48 g/mol
Synonyms	Tris(dimethylamido)(tert-pentylimido)tantalum(V); TAIATA; Taimata; (tert-Pentylimido)tris(dimethylamido)tantalum; Ta(NC(CH₃)₂C₂H₅)(N(CH₃)₂)₃; Tert-Amylimidotris(Dimethylamido)Tantalum; Pentylimidotris(dimethylamido)tantalum; ALD/CVD Tantalum Precursor
EINECS	Contact for details

Quality Control

Every batch of T-Amylimidotris(Dimethylamido)Tantalum(V) Taimata is manufactured and analyzed under strict quality management systems to ensure consistency and high purity for sensitive deposition processes. Our quality assurance protocol includes rigorous testing for metallic impurities, residual solvents, and compositional purity to meet the exacting standards of the semiconductor industry. A comprehensive Certificate of Analysis (COA) detailing lot-specific results is provided with each shipment.

Storage

Preserve in a tightly closed container, protected from light. Store under an inert atmosphere (argon or nitrogen) in a cool, dry, and well-ventilated area at room temperature (15-25°C). This material is highly volatile, easily oxidized, and hygroscopic (moisture-sensitive). Do not expose to air or moisture. Keep away from heat, sparks, and open flame.

Specification

Item	Specification
Appearance	Clear, colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Assay (NMR)	≥ 99.0%
Purity (GC)	≥ 99.5%
Density (at 20°C)	~1.15 g/mL
Metallic Impurities (ICP-MS)	< 10 ppm total
Chloride Content	< 5 ppm
Oxygen Content	< 50 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.