Description

Tetrakis(Ethylmethylamino)Silane (CAS NO 477284-75-6) is a high-purity, volatile organosilicon compound that serves as a critical precursor in advanced materials synthesis. Its value lies in its ability to deliver silicon and nitrogen in a highly reactive, vapor-phase form, enabling precise thin-film deposition. This product is essential for manufacturers in the semiconductor, photovoltaics, and specialty glass coatings industries seeking to enhance product performance through atomic-level material engineering.

Application

• Semiconductor Manufacturing: As a key precursor for Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Atomic Layer Deposition (ALD) of silicon nitride (SiNx) and silicon carbonitride (SiCN) dielectric and passivation layers.
• Photovoltaic Cells: Used in the deposition of anti-reflective and passivation coatings on silicon solar cells to improve light absorption and electrical efficiency.
• Optical & Barrier Coatings: For creating hard, transparent silicon-based coatings on plastics, metals, and glass for scratch resistance, gas barrier properties, and optical enhancement.
• Microelectronics Packaging: In the fabrication of low-k dielectric films and protective layers for advanced chip packaging applications.
• Research & Development: Serves as a versatile reagent in academic and industrial R&D for developing novel silicon-containing polymers and nanomaterials.

Basic Information

Item	Details
Product Name	Tetrakis(Ethylmethylamino)Silane
CAS No.	477284-75-6
Molecular Formula	C12H32N4Si
Molecular Weight	260.50 g/mol
Synonyms	Tetrakis(ethylmethylamido)silane; TEMAS; Si[N(CH3)C2H5]4; N,N-Ethylmethylaminosilane; Silane, tetrakis(ethylmethylamino)-; Silicon tetra(ethylmethylamide); (Ethylmethylamino)silane (4:1); Bis(diethylamino)silane related precursor
EINECS	Contact for details

Quality Control

Our Tetrakis(Ethylmethylamino)Silane is manufactured under stringent controls to ensure batch-to-batch consistency and high purity required for sensitive deposition processes. Quality is verified through comprehensive analytical methods including GC, NMR, and Karl Fischer titration. A Certificate of Analysis (COA) detailing purity, metal impurities, and moisture content is provided with each shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, and well-ventilated area at room temperature (15-25°C). Due to its highly volatile and hygroscopic (moisture-sensitive) nature, containers must be kept sealed under an inert atmosphere (argon or nitrogen) when not in use to prevent degradation and maintain specified purity.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Assay (GC)	≥ 99.0%
Water Content (KF)	≤ 50 ppm
Metal Impurities (ICP-MS)	≤ 10 ppm total
Density (at 20°C)	0.85 - 0.90 g/mL

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.