Description

Di(T-Butylamino)Silane is a specialized organosilicon compound featuring two tert-butylamino groups bonded to a silicon atom. This structure makes it a valuable precursor in the synthesis of advanced silicon-based materials, particularly for applications requiring controlled deposition and high purity. It is primarily utilized by manufacturers and R&D facilities in the semiconductor, thin-film coating, and specialty chemical industries.

Application

• Key precursor for Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) processes to create silicon nitride (SiN) or silicon carbonitride (SiCN) thin films.
• Used in the production of high-performance dielectric and barrier layers for advanced semiconductor devices and microelectronics.
• Intermediate in the synthesis of specialty silanes and silicon-based polymers with tailored thermal and mechanical properties.
• Research and development of novel ceramic and composite materials for aerospace and automotive applications.
• Surface modification agent to introduce amino-functional groups onto substrates for improved adhesion or catalysis.

Basic Information

Product Name	Di(T-Butylamino)Silane
CAS No.	186598-40-3
Molecular Formula	C8H22N2Si
Molecular Weight	174.36 g/mol
Synonyms	Bis(tert-butylamino)silane; Di-tert-butylaminosilane; Silane, bis(1,1-dimethylethyl)amino-; (Tert-butylamino)silane; DTBAS; Silicon di-tert-butylamide; N,N-Di-tert-butylsilanediamine
EINECS	Contact for details

Quality Control

Our Di(T-Butylamino)Silane is produced under stringent conditions to meet the exacting purity standards required for electronic-grade applications. Each batch undergoes comprehensive analytical testing, including GC, NMR, and Karl Fischer titration, to ensure consistent quality and performance. Certificates of Analysis (COA) detailing purity, identity, and impurity profiles are provided with every shipment.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, and well-ventilated place at room temperature (15-25°C). This compound is hygroscopic (moisture-sensitive) and must be handled under an inert atmosphere (e.g., nitrogen or argon) to prevent degradation. Keep away from heat, sparks, and open flames.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms
Purity (GC)	≥ 98.0%
Water Content (KF)	≤ 0.1%

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.