Description

Tetrakis(Ethylmethylamino)Zirconium (CAS NO 175923-04-3) is a high-purity organometallic compound belonging to the class of zirconium amides. This compound matters as a critical precursor in advanced materials science, enabling the precise deposition of zirconium-containing films. It is primarily needed by manufacturers in the semiconductor and specialty chemical industries for applications such as atomic layer deposition (ALD) and chemical vapor deposition (CVD).

Application

• Precursor for Atomic Layer Deposition (ALD) of zirconium oxide (ZrO₂) high-k dielectric films in semiconductor fabrication.
• Source material for Chemical Vapor Deposition (CVD) processes to create zirconium nitride or carbide coatings.
• Catalyst or catalyst precursor in specialized organic synthesis and polymerization reactions.
• Starting material for the sol-gel synthesis of advanced zirconia-based ceramics and nanomaterials.
• Used in research and development for next-generation memory devices and micro-electromechanical systems (MEMS).

Basic Information

Product Name	Tetrakis(Ethylmethylamino)Zirconium
CAS No.	175923-04-3
Molecular Formula	C12H32N4Zr
Molecular Weight	323.62 g/mol
Synonyms	TEMAZ; Zirconium(IV) tetrakis(ethylmethylamide); Tetrakis(N-ethyl-N-methylamido)zirconium(IV); Zirconium, tetrakis(ethylmethylamino)-; TEMAZr; Zirconium amide precursor; (N-Ethyl-N-methylamido)zirconium; Zr(NEtMe)4
EINECS	Contact for details

Quality Control

Our Tetrakis(Ethylmethylamino)Zirconium is produced under stringent conditions to meet the exacting purity standards required for semiconductor-grade precursors. Every batch undergoes rigorous analytical testing, including NMR, GC-MS, and elemental analysis, to ensure high chemical purity and consistency. Certificates of Analysis (COA) detailing all specifications are provided with each shipment.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry place at room temperature (15-25°C) under an inert atmosphere (argon or nitrogen) due to its moisture-sensitive and easily oxidized nature. Keep away from heat, open flames, and strong oxidizing agents.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (NMR)	Conforms to structure
Purity (GC)	≥ 99.5%
Zirconium (Zr) Content	≥ 28.0%
Density (at 20°C)	~1.05 g/cm³
Volatile Metals (ICP-MS)	< 10 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.