Description

Tetrafluorosilane (SiF₄) is a key inorganic fluoride compound essential for advanced material synthesis and semiconductor manufacturing. Its high reactivity and gaseous nature make it a critical precursor for depositing silicon-containing thin films and for introducing fluorine into various chemical processes. This product is indispensable for industries focused on electronics, optics, and specialty chemical production, where precise control over silicon and fluoride content is required.

Application

• Semiconductor Manufacturing: As a silicon source for Chemical Vapor Deposition (CVD) and plasma-enhanced CVD processes to create silicon dioxide (SiO₂) or silicon nitride (Si₃N₄) insulating layers.
• Optical Fiber Production: Used in the fabrication of fluoride glass and for doping silica glass to adjust the refractive index in fiber optic preforms.
• Fluorination Agent: Serves as a source of fluorine in organic and inorganic synthesis to produce fluorinated compounds and intermediates.
• Etching Gas: Employed in dry etching processes within the microelectronics industry for patterning silicon-based materials.
• Chemical Intermediate: A precursor in the production of other silicon fluorides, fumed silica, and high-purity silicon metal.
• Analytical Chemistry: Used in specific quantitative analysis techniques for determining silicate content.

Basic Information

Product Name	Tetrafluorosilane
CAS No.	7783-61-1
Molecular Formula	SiF₄
Molecular Weight	104.08 g/mol
Synonyms	Silicon tetrafluoride; Silicon(IV) fluoride; Tetrafluoridosilicon; Perfluorosilane; Silicon fluoride (SiF4); Fluosilicic anhydride
EINECS	232-015-5

Quality Control

Our Tetrafluorosilane is produced and handled under stringent quality management systems to ensure batch-to-batch consistency and reliability. Each lot is analyzed to meet exacting purity specifications critical for sensitive applications like semiconductor fabrication. A comprehensive Certificate of Analysis (COA) detailing gas purity, impurity profiles, and moisture content is provided with every shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed, properly rated cylinder or container, protected from light and physical damage. Store in a cool, well-ventilated area away from direct heat sources and incompatible materials such as moisture, strong alkalis, and reactive metals. Cylinders should be secured upright. Due to its highly volatile and gaseous nature, storage areas must have adequate ventilation and leak detection.

Specification

Item	Specification
Appearance	Colorless gas
Assay (SiF₄)	≥ 99.9%
Moisture (H₂O)	≤ 10 ppm
Oxygen (O₂)	≤ 5 ppm
Nitrogen (N₂)	≤ 20 ppm
Carbon Dioxide (CO₂)	≤ 5 ppm
Acidity (as HF)	≤ 1 ppm
Non-Volatile Residue	≤ 5 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.