Description

Trifluorosilane is a highly reactive, gaseous silicon-fluorine compound with the CAS number 13465-71-9. This specialty chemical serves as a critical precursor in advanced material synthesis, valued for its ability to introduce both silicon and fluorine functionalities. It is essential for manufacturers in the semiconductor, specialty chemical, and advanced materials sectors seeking to develop high-performance coatings, etchants, and novel silicon-based compounds.

Application

• Semiconductor Manufacturing: Used as a silicon and fluorine source in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes for thin-film growth and surface modification.
• Fluorosilane Synthesis: Acts as a key building block for the production of more complex organofluorosilanes and fluorinated siloxanes.
• Surface Functionalization: Employed to create hydrophobic, oleophobic, and chemically resistant coatings on glass, metals, and ceramics.
• Plasma Etching: Serves as a feed gas in plasma processes for microelectronics fabrication, enabling precise pattern transfer.
• Research & Development: Utilized in academic and industrial labs for developing new fluorinated materials, catalysts, and silicon chemistry.
• Specialty Chemical Intermediates: A precursor for synthesizing agrochemicals, pharmaceuticals, and other fine chemicals requiring fluorosilicon motifs.

Basic Information

Product Name	Trifluorosilane
CAS No.	13465-71-9
Molecular Formula	SiHF3
Molecular Weight	86.09 g/mol
Synonyms	Silicon trifluoride hydride; Fluoro silane; Trifluorosilicon hydride; Silane, trifluoro-; HSDB 6456; Trifluoro silane; Hydrogen trifluorosilane
EINECS	236-732-4

Quality Control

Our Trifluorosilane is produced and handled under stringent quality management protocols to ensure batch-to-batch consistency and purity for demanding industrial applications. We provide comprehensive Certificates of Analysis (COA) with each shipment, detailing key parameters such as purity, identity, and impurity profiles. Our quality systems are designed to support customers requiring material for GMP, ISO, or other regulated environments.

Storage

Preserve in a tightly closed, properly rated cylinder or container, protected from light and stored in a cool, well-ventilated area. Due to its highly volatile and gaseous nature, cylinders must be secured upright. Store away from incompatible materials such as strong acids, organic solvents, fluorides, and strong alkalis. Always use and store under appropriate pressure and with equipment compatible with corrosive gases.

Specification

Item	Specification
Appearance	Colorless gas
Identification (IR)	Conforms
Assay (GC)	≥ 99.0%
Moisture (KF)	≤ 50 ppm
Non-condensable gases	≤ 0.5%
High boiling residues	≤ 0.1%

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.