Description

Nitrogen Trifluoride CAS NO 7783-54-2 is a colorless, nonflammable, toxic gas with a characteristic musty odor. It serves as a critical high-purity fluorine source in advanced manufacturing processes, valued for its strong oxidizing properties and gaseous state. This compound is essential for industries requiring precise and clean etching or deposition, such as semiconductor fabrication and flat panel display production.

Application

• Primary etching and cleaning agent in the semiconductor industry for plasma-enhanced chemical vapor deposition (PECVD) chamber cleaning.
• Key fluorine source for dry etching of silicon, silicon nitride, and tungsten in microelectronics manufacturing.
• Used in the production of flat panel displays (FPDs) and thin-film solar cells for cleaning chemical vapor deposition tools.
• Employed as a fluorinating agent in the synthesis of specialty chemicals and high-energy materials.
• Component in high-power lasers, such as excimer lasers, due to its fluorine-donor properties.
• Utilized in the aerospace industry for specialized rocket propellant systems.

Basic Information

Product Name	Nitrogen Trifluoride
CAS No.	7783-54-2
Molecular Formula	NF₃
Molecular Weight	71.00 g/mol
Synonyms	Nitrogen fluoride (NF3); Trifluoramine; Trifluorammonia; Perfluoroammonia; Nitrogen fluoride; UN 2451; R 13B1; Freon 13B1
EINECS	232-007-1

Quality Control

Our Nitrogen Trifluoride is produced and analyzed to meet the stringent purity requirements of the electronics and specialty gas industries. Each batch undergoes rigorous quality testing via gas chromatography (GC) and other analytical techniques to ensure compliance with specifications. A Certificate of Analysis (COA) detailing purity, moisture, and critical impurity levels (such as CF₄, CO₂, N₂, O₂) is provided with every shipment.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, well-ventilated area away from direct sunlight, heat sources, and incompatible materials such as strong reducing agents, flammable materials, and finely divided metals. Cylinders should be secured upright and stored at temperatures not exceeding 52°C (125°F). Use appropriate pressure-rated equipment designed for hazardous gases.

Specification

Item	Specification
Appearance	Colorless Gas
Assay (NF₃)	≥ 99.99%
Carbon Tetrafluoride (CF₄)	≤ 50 ppm
Carbon Dioxide (CO₂)	≤ 10 ppm
Nitrogen (N₂)	≤ 100 ppm
Oxygen (O₂)	≤ 10 ppm
Moisture (H₂O)	≤ 5 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.