Description

Dichlorosilane is a highly reactive inorganic compound primarily used as a crucial precursor in the semiconductor and electronics industries. Its core value lies in its ability to deposit high-purity silicon and silicon nitride layers, which are fundamental to modern microchip fabrication. This product is essential for manufacturers of semiconductors, photovoltaic cells, and advanced optical coatings who require a reliable, high-quality source of silicon-containing gases.

Application

• Chemical Vapor Deposition (CVD): A key silicon source for depositing epitaxial silicon and polycrystalline silicon films on semiconductor wafers.
• Silicon Nitride Production: Reacts with ammonia to form silicon nitride (Si3N4) dielectric and passivation layers in microelectronics.
• Photovoltaics: Used in the manufacturing of thin-film silicon solar cells to enhance efficiency and light absorption.
• Optical Fiber Manufacturing: Employed in the production of high-purity silica glass for telecommunications fiber optics.
• Specialty Glass & Ceramics: Serves as a silicon dopant or precursor for creating high-performance glass and ceramic materials.
• Organic Synthesis: Acts as a silylating agent in the synthesis of organosilicon compounds and pharmaceuticals.

Basic Information

Product Name	Dichlorosilane
CAS No.	4109-96-0
Molecular Formula	SiH2Cl2
Molecular Weight	101.01 g/mol
Synonyms	Dichlorosilane; Silicone dichloride; DCS; Dichlorosilylene; Silylene dichloride; Silicon chloride hydride (SiH2Cl2); Chlorosilane
EINECS	223-888-3

Quality Control

Our Dichlorosilane is produced and handled under stringent quality management systems to ensure batch-to-batch consistency and high purity, critical for sensitive electronic applications. We provide comprehensive Certificates of Analysis (COA) detailing purity, impurity profiles, and moisture content. Our quality protocols are designed to meet the exacting standards of the semiconductor industry, including potential compliance with SEMI and other relevant electronic-grade specifications.

Storage

Preserve in a tightly closed, specially designed cylinder or container, protected from light and stored in a cool, well-ventilated area. Due to its highly volatile and gaseous nature, cylinders must be secured upright and kept away from heat sources, open flames, and incompatible materials. Store under an inert atmosphere if specified. Always use appropriate gas handling equipment and follow all local and international regulations for hazardous gas storage.

Specification

Item	Specification
Appearance	Colorless gas
Assay (GC)	≥ 99.9%
Trichlorosilane (SiHCl3)	≤ 0.05%
Silicon Tetrachloride (SiCl4)	≤ 0.03%
Hydrogen Chloride (HCl)	≤ 10 ppm
Moisture (H2O)	≤ 5 ppm
Total Metallic Impurities	≤ 1 ppm
Non-Volatile Residue	≤ 10 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.