Description

(T-Butylimido)Tris(Methylethylamino)Niobium, 98% is a high-purity organometallic precursor compound, also known as TBTMEN. This compound is valued for its role as a volatile, reactive source of niobium in advanced material synthesis. It is primarily utilized in the production of thin films and specialty coatings via chemical vapor deposition (CVD) and atomic layer deposition (ALD) techniques. Industries involved in semiconductor manufacturing, catalysis research, and nanotechnology development rely on this precursor for its consistent performance.

Application

• Chemical Vapor Deposition (CVD): A key precursor for depositing high-quality niobium nitride (NbN) or niobium oxide (Nb2O5) thin films on semiconductor wafers.
• Atomic Layer Deposition (ALD): Enables the controlled, layer-by-layer growth of niobium-containing films for advanced microelectronics and optical devices.
• Catalyst Research: Serves as a starting material or catalyst component in organic synthesis and polymerization reactions.
• Nanomaterial Synthesis: Used in the fabrication of niobium-based nanoparticles and nanostructures for energy storage and catalytic applications.
• Specialty Coatings: Applied to create wear-resistant, corrosion-resistant, or optically functional coatings on various substrates.
• Superconductor Development: Investigated for use in the deposition of thin films for superconducting radio frequency (SRF) cavities.

Basic Information

Product Name	(T-Butylimido)Tris(Methylethylamino)Niobium, 98%
CAS No.	864150-47-0
Molecular Formula	C13H33N4Nb
Molecular Weight	336.33 g/mol
Synonyms	Tris(diethylamino)(tert-butylimido)niobium; TBTMEN; (tert-Butylimido)tris(diethylamido)niobium(V); Niobium(V) tert-butylimide tris(diethylamide); Nb(NtBu)(NEt2)3; Tert-butylimidotris(diethylamino)niobium; CVD/ALD Niobium Precursor
EINECS	Contact for details

Quality Control

Our (T-Butylimido)Tris(Methylethylamino)Niobium, 98% is manufactured under strict quality protocols to ensure batch-to-batch consistency and high purity for sensitive deposition processes. Each lot undergoes comprehensive analysis, including assay and impurity profiling. A Certificate of Analysis (COA) detailing specific results for purity, identity, and trace metals is provided with every shipment to support your quality assurance requirements.

Storage

Preserve in a tightly closed container, protected from light. Store under an inert atmosphere (argon or nitrogen) in a cool, dry, and well-ventilated area. Due to its properties of being easily oxidized (store under inert atmosphere), hygroscopic (moisture-sensitive), and highly volatile, it is recommended to store the container at temperatures between 2°C and 8°C to maximize stability and shelf life. Allow the sealed container to reach ambient temperature before opening to minimize moisture ingress.

Specification

Item	Specification
Appearance	Clear, colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Assay (NMR/Titration)	≥ 98.0%
Density (at 20°C)	~1.05 g/cm³
Trace Metals (ICP-MS)	< 10 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.