Description

Selenium Hexafluoride is a high-purity, inorganic compound widely utilized in specialized industrial and research applications. As a powerful fluorinating and oxidizing agent, it is critical for processes requiring precise chemical reactivity and high material purity. This product is essential for manufacturers and R&D facilities in the semiconductor, specialty chemical, and advanced materials sectors seeking reliable, high-performance reagents.

Application

• Semiconductor Manufacturing: Used as a gaseous source for selenium doping and in the chemical vapor deposition (CVD) of thin films.
• Fluorination Reactions: Acts as a selective fluorinating agent in the synthesis of specialty fluorinated organic and inorganic compounds.
• Plasma Etching: Employed in plasma processes for microelectronics fabrication due to its reactive fluorine content.
• Chemical Research: Serves as a key reagent in research laboratories for developing new materials and catalytic systems.
• Laser Gas Mixtures: A component in specific excimer laser gas mixtures for specialized photolithography and material processing.
• Ion Implantation: Used as a source gas in ion implantation equipment for modifying material surface properties.

Basic Information

Product Name	Selenium Hexafluoride
CAS No.	7783-79-1
Molecular Formula	SeF6
Molecular Weight	192.95 g/mol
Synonyms	Selenium(VI) fluoride; Selenium fluoride (SeF6); Hexafluoroselenium; Selenium hexafluoride gas; UN2194; Selane, hexafluoro-; Perfluoroselane
EINECS	232-037-3

Quality Control

Our Selenium Hexafluoride is manufactured and handled under stringent quality management systems to ensure batch-to-batch consistency and high purity. Each lot is analyzed to meet precise specifications, with key parameters including purity, identity, and impurity profiles verified. A Certificate of Analysis (COA) detailing all test results is provided with every shipment to guarantee compliance with your technical requirements.

Storage

Preserve in a tightly closed, properly labeled, and dedicated cylinder or container, stored in a cool, dry, well-ventilated area away from incompatible materials. Protect from physical damage and extreme temperatures. Due to its gaseous and strong oxidizing nature, storage areas must comply with local regulations for hazardous gases.

Specification

Item	Specification
Appearance	Colorless gas
Identification (IR)	Conforms
Assay (GC)	≥ 99.0%
Water Content (KF)	≤ 50 ppm
Acidity (as HF)	≤ 10 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.