Description

Tetrakis(Hexamethyldisilazan)Zirkonium is a highly reactive organometallic compound used as a volatile precursor in advanced material synthesis. This compound matters for its ability to deliver high-purity zirconium in thin film deposition processes, which is critical for achieving precise material properties. It is primarily needed by manufacturers in the semiconductor, optical coating, and specialty ceramics industries for applications requiring exceptional purity and controlled stoichiometry.

Application

• Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD): As a key zirconium source for depositing high-k dielectric films (e.g., ZrO₂) in semiconductor manufacturing.
• Optical Coatings: For creating zirconium oxide-based anti-reflective, protective, and multi-layer optical films on lenses and precision glass.
• Specialty Ceramics and Powders: As a precursor in the synthesis of advanced zirconia ceramics and nanostructured materials.
• Surface Modification: For applying zirconium-containing functional layers to enhance surface properties like corrosion resistance or adhesion.
• Catalyst Research: Used in the development and study of novel heterogeneous catalysts.
• Polymer Additive Synthesis: As an intermediate in the production of specialized silicone-based polymers and cross-linking agents.

Basic Information

Product Name	Tetrakis(Hexamethyldisilazan)Zirkonium
CAS No.	616240-52-9
Molecular Formula	C₂₄H₇₂N₄Si₈Zr
Molecular Weight	734.88 g/mol
Synonyms	Zirconium(IV) tetrakis(hexamethyldisilazide); Tetrakis(hexamethyldisilazido)zirconium(IV); Zirconium tetrakis(hexamethyldisilazide); Zr(HMDS)₄; Zr[N(SiMe₃)₂]₄; Zirconium(IV) bis(trimethylsilyl)amide; Zirconium tetrakis(bis(trimethylsilyl)amide); Tetrakis[bis(trimethylsilyl)amido]zirconium
EINECS	Contact for details

Quality Control

Our Tetrakis(Hexamethyldisilazan)Zirkonium is produced and handled under stringent conditions to ensure batch-to-batch consistency and high purity, essential for sensitive deposition processes. Quality is verified through advanced analytical techniques including NMR, FT-IR, and elemental analysis. A comprehensive Certificate of Analysis (COA) detailing purity, identity, and trace metal content is provided with every shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Store under a dry, inert atmosphere (argon or nitrogen) at temperatures between 2°C and 8°C. This product is highly volatile, easily oxidized, and hygroscopic. It must be kept away from moisture, air, and incompatible materials such as strong acids, oxidizers, and protic solvents. Allow the sealed container to reach ambient temperature before opening to minimize moisture ingress.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (NMR)	Conforms to structure
Purity (NMR / GC)	≥ 98.0%
Zirconium Content	12.0 - 13.0 %
Trace Metals (ICP-MS)	≤ 50 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.