Description

Pentakis(Diethylamino)Tantalum is a high-purity organometallic compound of tantalum, widely recognized as a critical precursor in advanced materials synthesis. Its primary value lies in its role as a volatile, reactive source of tantalum for the deposition of ultra-thin, high-performance films. This product is essential for manufacturers and R&D facilities in the semiconductor, optical coating, and specialty chemical industries seeking precise and reliable metal-organic chemical vapor deposition (MOCVD) and atomic layer deposition (ALD) processes.

Application

• Semiconductor Manufacturing: As a key precursor for the MOCVD and ALD deposition of tantalum nitride (TaN) and tantalum oxide (Ta2O5) thin films used as diffusion barriers and high-k dielectric layers.
• Optical Coatings: For depositing high-refractive-index tantalum oxide films on lenses, laser optics, and other precision optical components.
• Catalysis Research: Serving as a catalyst precursor or a reagent in the synthesis of novel organometallic complexes and materials.
• Surface Functionalization: Used in the chemical modification of surfaces to impart specific electronic or chemical properties.
• Specialty Chemical Synthesis: As a versatile starting material for the preparation of other tantalum-containing compounds.

Basic Information

Product Name	Pentakis(Diethylamino)Tantalum
CAS No.	55161-66-5
Molecular Formula	C20H50N5Ta
Molecular Weight	546.61 g/mol
Synonyms	Tantalum(V) Diethylamide; Tantalum Pentakis(diethylamide); TDEAT; Ta(NEt2)5; Diethylamidotantalum; Tantalum Diethylamide; Penta(diethylamino)tantalum; Tantalum(V) Diethylamido Complex
EINECS	Contact for details

Quality Control

Our Pentakis(Diethylamino)Tantalum is produced and handled under stringent quality management protocols. Each batch undergoes comprehensive analytical testing to ensure high purity and consistency, meeting the exacting requirements of semiconductor and advanced materials applications. A detailed Certificate of Analysis (COA) is provided with every shipment, confirming specifications for assay, metal content, and critical impurity levels.

Storage

Preserve in a tightly closed container, protected from light. Store under an inert atmosphere (e.g., nitrogen or argon) at room temperature (15-25°C) in a cool, dry, and well-ventilated area. Due to its highly volatile and easily oxidized nature, containers must be kept sealed and handled with appropriate precautions to prevent exposure to air and moisture.

Specification

Item	Specification
Appearance	Clear, colorless to pale yellow liquid
Identification (IR)	Conforms to reference spectrum
Assay (Tantalum Content)	≥ 99.9% (metals basis)
Purity (by NMR/GC)	≥ 99.0%
Density (at 20°C)	~1.2 g/mL
Volatile Impurities (GC)	≤ 0.5% total
Metallic Impurities (ICP-MS)	≤ 100 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.