Description

Tris(Diethylamido)Aluminum(III) 99.99% is a high-purity organoaluminum compound, specifically a trialkylamidoalane, serving as a versatile precursor in advanced materials synthesis. Its exceptional purity of 99.99% is critical for applications demanding ultra-low metallic impurities to ensure optimal performance and yield. This compound is primarily needed by manufacturers in the semiconductor, LED, and specialty chemical industries for processes such as atomic layer deposition (ALD) and chemical vapor deposition (CVD).

Application

• As a key nitrogen source and aluminum precursor in the Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) of aluminum nitride (AlN) thin films for semiconductors and microelectronics.
• In the production of high-brightness LEDs and laser diodes, where AlN layers act as buffer layers or active components.
• As a catalyst or catalyst precursor in specialized organic synthesis and polymerization reactions within fine chemical manufacturing.
• For the synthesis of other high-purity aluminum-containing compounds and advanced ceramic materials used in research and development.
• In the fabrication of piezoelectric devices and surface acoustic wave (SAW) filters utilizing high-quality AlN films.
• As a dopant or modifying agent in the development of novel composite materials and nanostructures.

Basic Information

Product Name	Tris(Diethylamido)Aluminum(III) 99.99%
CAS No.	352546-72-6
Molecular Formula	C12H30AlN3
Molecular Weight	243.37 g/mol
Synonyms	Tris(diethylamino)aluminum; Tris(N,N-diethylamido)aluminum; Aluminum tris(diethylamide); Tris(diethylamido)alane; TDEAA; Al(NEt2)3; (Diethylamino)aluminum (3:1); Aluminum tri(diethylamide)
EINECS	Contact for details

Quality Control

Our Tris(Diethylamido)Aluminum(III) 99.99% is manufactured under stringent conditions to meet the exacting standards of the electronics and advanced materials industries. Each batch undergoes rigorous analytical testing, including NMR, GC-MS, and elemental analysis, to verify identity, purity, and trace metal content. A comprehensive Certificate of Analysis (COA) detailing all specifications is provided with every shipment to ensure full traceability and quality assurance for our global B2B clients.

Storage

Preserve in a tightly closed container, protected from light. Store under a dry, inert atmosphere (argon or nitrogen) at temperatures between 2°C and 8°C (refrigerated) to maximize shelf-life stability. This compound is moisture-sensitive (hygroscopic) and easily oxidized; it must be handled exclusively under anhydrous and oxygen-free conditions using standard Schlenk line or glovebox techniques.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (NMR)	Conforms to structure
Assay (GC)	≥ 99.99%
Aluminum (Al) Content	10.8 - 11.2 %
Trace Metals (ICP-MS)	< 10 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.