Description

Tetrakis(Ethylmethylamino)Titanium (CAS NO 308103-54-0) is a high-purity organometallic compound primarily used as a precursor for advanced thin-film deposition. Its value lies in its ability to deliver high-quality titanium-containing films with excellent step coverage and conformality at relatively low processing temperatures. This makes it a critical material for manufacturers in the semiconductor, photovoltaic, and optical coating industries seeking to enhance device performance and miniaturization.

Application

• Semiconductor Manufacturing: As a key precursor for Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) of titanium nitride (TiN) diffusion barriers and gate electrodes.
• Advanced Memory & Logic Devices: For depositing conductive and dielectric layers in DRAM, 3D NAND, and FinFET architectures.
• Photovoltaics: Used in the deposition of anti-reflective and passivation layers to improve solar cell efficiency.
• Optical & Protective Coatings: For creating hard, wear-resistant titanium-based coatings on lenses, displays, and tools.
• Research & Development: Serves as a starting material in organometallic chemistry and materials science research for novel catalysts and nanomaterials.

Basic Information

Item	Details
Product Name	Tetrakis(Ethylmethylamino)Titanium
CAS No.	308103-54-0
Molecular Formula	C12H32N4Ti
Molecular Weight	280.30 g/mol
Synonyms	TEMAT; Tetrakis(ethylmethylamido)titanium(IV); TDMAT analogue; Ti(NEtMe)4; Titanium(IV) ethylmethylamide; 4-Ethyl(methyl)amino titanium; TET; Titanium precursor for ALD/CVD
EINECS	Contact for details

Quality Control

Our Tetrakis(Ethylmethylamino)Titanium is manufactured and handled in a controlled environment to ensure exceptional purity and batch-to-batch consistency, critical for sensitive deposition processes. Each lot undergoes rigorous analysis, including assay and impurity profiling via advanced techniques like NMR and GC-MS. A comprehensive Certificate of Analysis (COA) detailing all specifications is provided with every shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, and well-ventilated area under an inert atmosphere (e.g., nitrogen or argon) due to its moisture-sensitive and easily oxidized nature. Recommended storage temperature is between 2°C and 8°C to maintain optimal stability and prevent decomposition. Keep away from heat, sparks, and open flames.

Specification

Item	Specification
Appearance	Clear, colorless to pale yellow liquid
Identification (NMR)	Conforms to structure
Assay (Titanium content)	≥ 99.9% (metals basis)
Purity (GC)	≥ 99.5%
Density (at 20°C)	~0.92 g/mL
Volatile Metals (ICP-MS)	< 10 ppm total
Chloride Content	< 50 ppm

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.