Description

Pr(Facam)3 CAS NO 38053-99-5 is a high-purity rare earth coordination compound, specifically praseodymium(III) tris(hexafluoroacetylacetonate). This advanced material is valued for its role as a volatile precursor in thin film deposition processes, enabling precise control over film composition and properties. It is essential for manufacturers and R&D facilities in the semiconductor, optical coating, and advanced materials sectors seeking to integrate praseodymium-based functionalities.

Application

• Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) precursor for praseodymium oxide (PrxOy) thin films.
• Fabrication of high-k dielectric layers and gate oxides in semiconductor devices and microelectronics.
• Deposition of specialized optical coatings and films for lasers, sensors, and photonic components.
• Production of catalytic materials and surfaces for research and industrial processes.
• Synthesis of advanced ceramic and composite materials via precursor routes.
• Source material in materials science research for developing new praseodymium-containing compounds.

Basic Information

Product Name	Pr(Facam)3
CAS No.	38053-99-5
Molecular Formula	C15H3F18O6Pr
Molecular Weight	~ 738.09 g/mol
Synonyms	Praseodymium(III) tris(hexafluoroacetylacetonate); Praseodymium tris(1,1,1,5,5,5-hexafluoro-2,4-pentanedionate); Pr(hfac)3; Praseodymium hexafluoroacetylacetonate; Praseodymium 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; Pr(III) hfac complex; Praseodymium β-diketonate complex
EINECS	Contact for details

Quality Control

Our Pr(Facam)3 is produced and handled under controlled conditions to ensure batch-to-batch consistency and high purity suitable for demanding deposition applications. Each lot undergoes rigorous analytical testing. A comprehensive Certificate of Analysis (COA) detailing purity, metal content, and impurity profiles is provided with every shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, well-ventilated area at room temperature (15-25°C). This compound is moisture-sensitive (hygroscopic) and may decompose upon prolonged exposure to air or moisture. Handle and store under an inert atmosphere (e.g., nitrogen or argon) for long-term stability.

Specification

Item	Specification
Appearance	Yellow to orange crystalline solid or powder
Identification (IR)	Conforms to structure
Assay (Pr content)	≥ 99.9% (Trace Metals Basis)
Purity (HPLC)	≥ 99.5%
Volatile Residuals	< 0.5%
Solubility	Soluble in organic solvents (e.g., THF, toluene)

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.