Description

Tris(Hexamethyldisilazan)Titanium is a highly reactive organometallic compound used as a specialized precursor in advanced material synthesis. This compound matters for its ability to deposit high-purity titanium-containing films with exceptional conformity and precise stoichiometric control. It is primarily needed by manufacturers in the semiconductor, photovoltaic, and specialty glass coating industries for applications requiring ultra-thin, uniform layers.

Application

• Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD): A key precursor for depositing titanium nitride (TiN), titanium oxide (TiO2), and other titanium-based thin films on semiconductor wafers and optical components.
• Semiconductor Fabrication: Used in the production of diffusion barriers, gate electrodes, and capacitor electrodes in advanced microelectronic devices.
• Photovoltaic Cells: Employed in the deposition of anti-reflective and passivation layers to enhance the efficiency of solar panels.
• Optical and Protective Coatings: For creating hard, transparent coatings on lenses, displays, and architectural glass.
• Catalyst Synthesis: Serves as a catalyst precursor in specialized organic synthesis and polymerization reactions.
• Research & Development: A critical reagent in academic and industrial R&D for developing new nanomaterials and electronic materials.

Basic Information

Product Name	Tris(Hexamethyldisilazan)Titanium
CAS No.	37512-29-1
Molecular Formula	C18H57N3Si6Ti
Molecular Weight	540.08 g/mol
Synonyms	Tris(hexamethyldisilazido)titanium; Titanium tris(hexamethyldisilazide); Tris(bis(trimethylsilyl)amido)titanium; Ti(HMDS)3; Ti(N(SiMe3)2)3; Titanium(III) tris(di(trimethylsilyl)amide); Tris(N,N-bis(trimethylsilyl)amido)titanium; TITANIUM TRIS(DI(TRIMETHYLSILYL)AMIDE)
EINECS	Contact for details

Quality Control

Our Tris(Hexamethyldisilazan)Titanium is produced and handled under stringent quality management systems. Each batch undergoes rigorous analytical testing, including assay and impurity profiling via advanced techniques like NMR and ICP-MS, to ensure high purity and batch-to-batch consistency critical for deposition processes. Certificates of Analysis (COA) with full traceability are provided with every shipment.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, and well-ventilated area at room temperature (15-25°C). This material is hygroscopic (moisture-sensitive) and highly volatile. For long-term storage, it is recommended to keep the container under an inert atmosphere such as argon or nitrogen.

Specification

Item	Specification
Appearance	Yellow to amber liquid
Identification (NMR)	Conforms to structure
Assay (Titanium content)	≥ 98.0%
Purity (by 1H NMR)	≥ 99.0%
Density (at 20°C)	~0.95 g/mL
Volatile Matter	< 1.0%
Trace Metals (ICP-MS)	Contact for details

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.