Description

1,1,1,3,3,3-Hexafluorotrisilane is a highly specialized organosilicon compound, serving as a critical precursor in advanced material synthesis. Its value lies in its ability to introduce silicon and fluorine functionalities, enabling the creation of high-performance coatings and electronic materials. This product is essential for R&D and manufacturing within the semiconductor, thin-film deposition, and specialty chemical industries. We provide a reliable supply of high-purity material to support innovation in these demanding fields.

Application

• Semiconductor Manufacturing: As a key precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes to create silicon-based dielectric and barrier films.
• Thin-Film Coatings: Used in the production of hydrophobic, oleophobic, and protective coatings for optical components and precision surfaces.
• Advanced Material Synthesis: Serves as a building block for synthesizing novel fluorinated silane compounds and silicon-containing polymers.
• Surface Modification: Employed to functionalize glass, silicon wafers, and metal oxides to alter surface energy and adhesion properties.
• Research & Development: A vital reagent in academic and industrial labs for exploring new silicon-fluorine chemistry and material properties.

Basic Information

Product Name	1,1,1,3,3,3-Hexafluorotrisilane
CAS No.	35103-07-2
Molecular Formula	Si3F6H6
Molecular Weight	196.33 g/mol
Synonyms	Trisilane, 1,1,1,3,3,3-hexafluoro-; Hexafluorotrisilane; Trisilyl fluoride; Perfluorotrisilane; HTS; Si3F6H6; F3Si-SiH2-SiF3; 1,1,1,3,3,3-Hexafluorotrisilane
EINECS	Contact for details

Quality Control

Our 1,1,1,3,3,3-Hexafluorotrisilane is produced and handled under stringent quality management protocols to ensure batch-to-batch consistency and high purity. Each lot is analyzed using advanced techniques such as GC, NMR, and Karl Fischer titration to verify critical parameters including assay, moisture content, and impurity profiles. A comprehensive Certificate of Analysis (COA) detailing all test results is provided with every shipment to support your quality assurance requirements.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, well-ventilated area away from incompatible materials such as strong bases and oxidizers. Due to its hygroscopic and highly volatile nature, the container must be kept sealed under an inert atmosphere (e.g., nitrogen or argon) when not in use. Recommended storage temperature is 2-8°C to maximize stability.

Specification

Item	Specification
Appearance	Colorless liquid
Identification (IR)	Conforms
Assay (GC)	≥ 98.0%
Moisture (KF)	≤ 0.1%
Density (20°C)	~1.3 g/mL
Boiling Point	~40-45°C

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.