Description

Bis(Diethylamino)Silane is a highly reactive organosilicon compound that serves as a critical precursor in advanced material synthesis. Its value lies in its ability to introduce silicon and nitrogen functionalities under mild conditions, enabling precise thin-film deposition and surface modification. This chemical is essential for manufacturers and R&D facilities in the semiconductor, photovoltaics, and specialty polymer industries seeking high-purity intermediates for vapor-phase processes.

Application

• Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD): A key silicon and nitrogen source for depositing silicon nitride (SiNx) and silicon carbonitride (SiCN) thin films on semiconductor wafers and optical components.
• Surface Functionalization: Used as a silylating agent to modify the surface properties of silica, metals, and other inorganic substrates, improving adhesion or introducing specific reactive sites.
• Precursor for Silazane Polymers: Acts as a building block in the synthesis of polyorganosilazanes, which are preceramic polymers used to produce silicon nitride and oxynitride ceramics.
• Photovoltaic Manufacturing: Employed in the production of anti-reflective and passivation coatings for solar cells to enhance efficiency and durability.
• Specialty Silicone Synthesis: Serves as an intermediate in the development of custom silicone resins and elastomers with tailored thermal and mechanical properties.
• Catalyst and Ligand Chemistry: Utilized in organometallic chemistry to create novel catalysts or ligand systems for organic synthesis.

Basic Information

Product Name	Bis(Diethylamino)Silane
CAS No.	27804-64-4
Molecular Formula	C8H22N2Si
Molecular Weight	174.36 g/mol
Synonyms	Bis(N,N-diethylamino)silane; Diethylaminosilane; Silane, bis(diethylamino)-; N,N-Diethyl-1,1-bis(diethylamino)silane (related); Silicon tetra(diethylamide) (related structure); TDEAS (common abbreviation); BDEAS
EINECS	Contact for details

Quality Control

Our Bis(Diethylamino)Silane is produced and handled under strict quality management systems to ensure batch-to-batch consistency and high purity suitable for sensitive electronic applications. Each lot is analyzed using advanced techniques including GC, NMR, and Karl Fischer titration. A comprehensive Certificate of Analysis (COA) detailing purity, moisture content, and metal impurities is provided with every shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, well-ventilated area at temperatures between 2°C and 8°C (refrigerated) or as specified on the label. Due to its hygroscopic and highly volatile nature, containers must be kept sealed under an inert atmosphere (argon or nitrogen) and allowed to equilibrate to room temperature before opening to minimize moisture ingress and pressure buildup.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms to reference spectrum
Assay (GC)	≥ 98.0%
Water Content (KF)	≤ 0.1%
Chloride (Cl)	≤ 10 ppm
Metals (ICP-MS)	≤ 1 ppm total (Na, K, Ca, Fe, etc.)

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.