Description

Tris(Dimethylsilyl)Amine is a versatile organosilicon compound, also known as hexamethyldisilazane (HMDS) derivative, that serves as a key reagent in advanced material synthesis. Its primary value lies in its dual functionality as a silylating agent and a precursor for silicon nitride ceramics, offering high reactivity and purity for demanding industrial processes. This chemical is essential for manufacturers and R&D teams in the semiconductor, pharmaceutical, and specialty polymer industries who require reliable, high-purity intermediates for surface modification, catalysis, and protective coating applications.

Application

• Semiconductor Manufacturing: Used as a silylating agent for surface passivation and as a precursor in chemical vapor deposition (CVD) for silicon nitride thin films.
• Pharmaceutical Synthesis: Functions as a protecting group for amines and alcohols in the synthesis of complex drug molecules and active pharmaceutical ingredients (APIs).
• Polymer & Resin Production: Serves as a cross-linking agent or modifier in the production of heat-resistant silicones, epoxy resins, and specialty polymers.
• Ceramic Precursor: A key starting material in the sol-gel and pyrolysis processes for manufacturing high-purity silicon nitride (Si3N4) ceramics and coatings.
• Catalysis & Ligand Synthesis: Employed in the preparation of metal-organic frameworks (MOFs) and as a ligand precursor in organometallic catalysis.
• Surface Treatment: Applied to modify the surface properties of silica, metals, and other inorganic materials to enhance hydrophobicity or adhesion.

Basic Information

Product Name	Tris(Dimethylsilyl)Amine
CAS No.	21331-86-2
Molecular Formula	C6H21NSi3
Molecular Weight	191.49 g/mol
Synonyms	Hexamethyldisilazane, HMDS, 1,1,1,3,3,3-Hexamethyldisilazane, Bis(trimethylsilyl)amine, N,N-Bis(trimethylsilyl)amine, Tris(trimethylsilyl)amine (common misnomer), TMS2NH, N-(Trimethylsilyl)trimethylsilylamine
EINECS	244-349-3

Quality Control

Our Tris(Dimethylsilyl)Amine is produced under stringent quality management systems. Each batch undergoes rigorous analytical testing, including GC, NMR, and Karl Fischer titration, to ensure high purity and consistency. A comprehensive Certificate of Analysis (COA) detailing purity, identity, and impurity profiles is provided with every shipment to guarantee compliance with your specific application requirements.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, and well-ventilated area at room temperature (15-25°C). Due to its hygroscopic (moisture-sensitive) nature, containers must be kept tightly sealed under an inert atmosphere (nitrogen or argon) after opening to prevent degradation. Keep away from heat, sparks, open flames, and strong oxidizing agents.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Assay (GC)	≥ 98.0%
Water Content (KF)	≤ 0.1%
Density (20°C)	0.77 - 0.79 g/mL
Refractive Index (n20/D)	1.407 - 1.409

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.