Description

(Fluoromethyl)(Phenyl)(2,3,4,5-Tetramethylphenyl)Sulfonium Tetrafluoroborate is a specialized sulfonium salt photoacid generator (PAG) critical for advanced photolithography processes. This high-purity compound matters for its role in generating acid upon exposure to light, which is essential for patterning microelectronic circuits with extreme precision. It is primarily needed by manufacturers in the semiconductor and electronics industries for producing next-generation integrated circuits and microchips.

Application

• Semiconductor Photolithography: As a key photoacid generator (PAG) in chemically amplified photoresists for deep ultraviolet (DUV) and extreme ultraviolet (EUV) lithography.
• Advanced Microfabrication: Enables the creation of high-resolution patterns on silicon wafers for microprocessors and memory chips.
• Electronic Chemicals: A critical component in high-purity formulations for the electronics supply chain.
• Photo-polymerization Initiator: Used in specialized UV-curing applications for high-performance polymers and coatings.
• Research & Development: Serves as a reagent in academic and industrial R&D for developing new photoresist materials and lithographic techniques.

Basic Information

Product Name	(Fluoromethyl)(Phenyl)(2,3,4,5-Tetramethylphenyl)Sulfonium Tetrafluoroborate
CAS No.	1009088-40-7
Molecular Formula	C₁₉H₂₄BF₅S
Molecular Weight	390.27 g/mol
Synonyms	Fluoromethyl-phenyl-(2,3,4,5-tetramethylphenyl)sulfonium tetrafluoroborate; (Fluoromethyl)(Phenyl)(2,3,4,5-Tetramethylphenyl)Sulfonium Tetrakis(fluoranyl)boranuide; Sulfonium, (fluoromethyl)phenyl(2,3,4,5-tetramethylphenyl)-, tetrafluoroborate(1-); PAG; Photoacid Generator; Sulfonium Salt PAG; Lithography PAG; Electronic Grade Sulfonium Salt.
EINECS	Contact for details

Quality Control

Our (Fluoromethyl)(Phenyl)(2,3,4,5-Tetramethylphenyl)Sulfonium Tetrafluoroborate is manufactured under strict quality management systems to meet the exacting standards of the semiconductor industry. Each batch undergoes rigorous analytical testing, including HPLC, NMR, and ICP-MS, to ensure ultra-high purity and minimal trace metal content. A comprehensive Certificate of Analysis (COA) detailing purity, identity, and impurity profiles is provided with every shipment.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry place at a controlled room temperature (15-25°C). This material is light-sensitive and should be handled under appropriate conditions to maintain stability. Keep the container tightly sealed in a dry environment to prevent moisture absorption.

Specification

Item	Specification
Appearance	White to off-white crystalline powder
Identification (IR)	Conforms to structure
Purity (HPLC)	≥ 99.0%
Water Content (KF)	≤ 0.5%
Residue on Ignition	≤ 0.1%
Trace Metals (ICP-MS)	≤ 10 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.