Description

Trisilane CAS NO 134303-33-6 is a highly volatile, silicon-based hydride compound that serves as a critical precursor in advanced material synthesis. Its value lies in its ability to deliver silicon atoms efficiently for the deposition of high-purity silicon films and nanostructures. This product is essential for research and manufacturing in the semiconductor, photovoltaics, and nanotechnology sectors, where precise control over silicon deposition is paramount for device performance.

Application

• Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD): As a key silicon source for depositing amorphous silicon (a-Si), silicon carbide (SiC), or silicon nitride (Si3N4) thin films on substrates.
• Semiconductor Manufacturing: Used in the production of next-generation microelectronic components and insulating or barrier layers.
• Photovoltaics: Employed in the research and development of high-efficiency solar cells, including thin-film and tandem cell technologies.
• Nanomaterials Synthesis: A precursor for the fabrication of silicon nanowires, quantum dots, and other nanostructured materials.
• Surface Functionalization: Used to create silicon-rich coatings or modify surface properties for specialized applications.
• Research & Development: Serves as a fundamental reagent in organosilicon chemistry and materials science research within academic and industrial laboratories.

Basic Information

Item	Detail
Product Name	Trisilane
CAS No.	134303-33-6
Molecular Formula	Si3H8
Molecular Weight	92.32 g/mol
Synonyms	Silicon Hydride (Si3H8); Trisilicon Octahydride; Cyclotrisilane; Disilanyl Silane; Hydrogen Trisilanide; Silicon Hydride Polymer; Perhydropolysilane; SiH-3 (industry abbreviation)
EINECS	Contact for details

Quality Control

Our Trisilane is produced and handled under stringent conditions to ensure high purity and batch-to-batch consistency. Quality is verified through advanced analytical techniques including gas chromatography (GC) and spectroscopic methods. A comprehensive Certificate of Analysis (COA) detailing purity, identity, and impurity profiles is provided with each shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Due to its highly volatile and easily oxidized nature, this material must be stored under an inert atmosphere (e.g., argon or nitrogen) at recommended temperatures, typically between 2°C and 8°C for extended stability. Store away from heat, sparks, open flames, and incompatible materials such as strong oxidizers. Use appropriate, dedicated ventilation.

Specification

Item	Specification
Appearance	Colorless liquid
Identification (IR)	Conforms
Assay (GC)	≥ 98.0%
Disilane (Si2H6)	≤ 1.0%
Monosilane (SiH4)	≤ 0.5%
Higher Silanes (Si4H10+)	≤ 0.5%
Moisture (Karl Fischer)	≤ 50 ppm
Metallic Impurities	Contact for details

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.