Description

Pentakis(Dimethylamino)Tantalum is a highly specialized organometallic compound, serving as a critical precursor in advanced materials synthesis. Its primary value lies in its ability to deliver high-purity tantalum in thin film deposition processes, which is essential for next-generation semiconductor and optical device manufacturing. This product is indispensable for R&D and production teams in the electronics, nanotechnology, and specialty chemical sectors seeking reliable, high-performance metal-organic sources.

Application

• Primary precursor for Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) of tantalum-containing films.
• Fabrication of high-k dielectric layers (e.g., tantalum pentoxide, Ta2O5) for semiconductor memory devices and capacitors.
• Deposition of diffusion barriers and adhesion layers in microelectronic interconnects.
• Production of optical coatings for lenses and laser components due to its high refractive index.
• Research and development of novel catalysts for organic synthesis and polymerization reactions.
• Synthesis of other high-purity tantalum compounds and nanomaterials.

Basic Information

Product Name	Pentakis(Dimethylamino)Tantalum
CAS No.	19824-59-0
Molecular Formula	C10H30N5Ta
Molecular Weight	378.36 g/mol
Synonyms	Tantalum(V) dimethylamide; Tantalum(V) pentakis(dimethylamide); Tantalum pentakis(dimethylamino); PDMAT; Ta(NMe2)5; Dimethylamidotantalum; Tantalum dimethylamide; Tantalum(V) dimethylamido complex
EINECS	Contact for details

Quality Control

Our Pentakis(Dimethylamino)Tantalum is manufactured under stringent conditions to ensure exceptional purity and batch-to-batch consistency, meeting the exacting requirements of the electronics industry. Each lot is supported by a comprehensive Certificate of Analysis (COA) detailing key analytical parameters. We adhere to rigorous internal quality standards and can support customer-specific qualification for advanced fabrication processes.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry place at room temperature (15-25°C). This compound is hygroscopic (moisture-sensitive) and must be handled under an inert atmosphere (e.g., nitrogen or argon) to prevent decomposition. Keep away from strong oxidizers and acids.

Specification

Item	Specification
Appearance	Yellow to amber liquid
Identification (IR)	Conforms to structure
Assay (Tantalum content)	≥ 99.9% (metals basis)
Purity (by NMR/HPLC)	≥ 99.5%
Density (at 20°C)	~1.25 g/mL
Volatile Impurities (GC)	< 0.5%
Metallic Impurities (ICP-MS)	< 10 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.