Description

Tetramethylsilazane (CAS NO 18116-02-4) is a versatile organosilicon compound primarily used as a silylating agent and a key intermediate in the synthesis of advanced materials. Its value lies in its ability to introduce protective trimethylsilyl groups and serve as a nitrogen source in the production of silicon nitride ceramics and thin films. This chemical is essential for manufacturers and R&D facilities in the semiconductor, pharmaceutical, and specialty chemical industries seeking high-purity precursors for surface modification and advanced material synthesis.

Application

• Semiconductor Manufacturing: As a precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) of silicon nitride (Si3N4) dielectric and passivation layers.
• Pharmaceutical Synthesis: Employed as a silylating agent to protect reactive functional groups (e.g., -OH, -NH) during complex multi-step synthetic processes.
• Surface Modification: Used to hydrophobize surfaces of silica, glass, or other metal oxides by forming a stable, trimethylsilylated monolayer.
• Ceramic Precursor: A key starting material in the polymer-derived ceramics (PDC) route for producing high-performance silicon nitride-based components.
• Crosslinking Agent: Utilized in the formulation of specific silicone polymers and resins to introduce nitrogen-containing linkages.
• Laboratory Reagent: Serves as a derivatization agent in gas chromatography (GC) and other analytical techniques for the analysis of polar compounds.

Basic Information

Item	Details
Product Name	Tetramethylsilazane
CAS No.	18116-02-4
Molecular Formula	C4H13NSi
Molecular Weight	103.24 g/mol
Synonyms	1,1,1,3,3,3-Hexamethyldisilazane; HMDS; Bis(trimethylsilyl)amine; Hexamethyldisilazane; N,N-Bis(trimethylsilyl)amine; BSA; Bis(trimethylsilyl)amine; HMDS
EINECS	242-000-1

Quality Control

Our Tetramethylsilazane is produced and tested under stringent quality management systems to ensure batch-to-batch consistency and high purity for demanding industrial applications. We provide comprehensive Certificates of Analysis (COA) with each shipment, detailing key parameters such as assay, identity, and impurity profiles. Our quality commitment aligns with ISO 9001 standards, and we support compliance with relevant global regulatory frameworks including REACH.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, well-ventilated area at temperatures between 15-25°C. This product is highly volatile and hygroscopic (moisture-sensitive). Keep away from heat, sparks, open flames, and incompatible materials such as strong acids and oxidizing agents. Use under an inert atmosphere (e.g., nitrogen or argon) for prolonged storage or after opening to maintain purity.

Specification

Item	Specification
Appearance	Colorless clear liquid
Identification (IR)	Conforms
Assay (GC)	≥ 99.0 %
Water Content (Karl Fischer)	≤ 0.1 %
Chloride (as Cl)	≤ 10 ppm
Refractive Index (n20D)	1.407 - 1.409
Density (20°C)	0.774 - 0.778 g/mL
Boiling Point	125 - 127 °C

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.