Description

Tris(Diethylamino)-Silane is a highly reactive organosilicon compound primarily used as a precursor in vapor deposition processes. This compound matters for its ability to deliver high-purity silicon and silicon nitride films with excellent conformality and step coverage at relatively low temperatures. Industries such as semiconductor manufacturing, photovoltaics, and advanced optics rely on this chemical for the production of thin-film coatings, dielectric layers, and passivation films. Its reactivity profile makes it a critical material in chemical vapor deposition (CVD) and atomic layer deposition (ALD) applications.

Application

• Precursor for Silicon Nitride (SiN) thin films in semiconductor device fabrication via Plasma-Enhanced Chemical Vapor Deposition (PECVD) or Low-Pressure Chemical Vapor Deposition (LPCVD).
• Source material for high-purity silicon coatings in photovoltaic cells and optical components.
• Key reagent in the surface functionalization and modification of silica and other metal oxides.
• Intermediate in the synthesis of specialized silicon-based polymers and advanced ceramic materials.
• Used in Atomic Layer Deposition (ALD) processes to create ultra-thin, conformal layers for microelectronics.
• Employed in research and development for novel nanomaterials and catalytic systems.

Basic Information

Product Name	Tris(Diethylamino)-Silane
CAS No.	15730-66-2
Molecular Formula	C12H31N3Si
Molecular Weight	245.48 g/mol
Synonyms	Tris(diethylamino)silane; Tris(N,N-diethylamino)silane; Silane, tris(diethylamino)-; N,N-Diethyl-1,1,1-triethylsilanetriamine; Tri(diethylamino)silane; ATS; TDEAS; Tris(diethylamino)silicon
EINECS	239-842-9

Quality Control

Our Tris(Diethylamino)-Silane is manufactured under strict quality control protocols to ensure batch-to-batch consistency and high purity suitable for demanding electronic applications. Each lot is analyzed to confirm identity, purity, and the absence of critical metallic impurities. A comprehensive Certificate of Analysis (COA) detailing specifications such as assay, moisture content, and trace metal levels is provided with every shipment to support your quality assurance and regulatory needs.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, well-ventilated area under an inert atmosphere (e.g., nitrogen or argon) due to its moisture-sensitive and highly volatile nature. Recommended storage temperature is 2-8°C to maintain stability and minimize decomposition. Keep away from heat, sparks, open flames, and oxidizing agents.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms
Assay (GC)	≥ 98.0%
Density (at 20°C)	0.85 - 0.87 g/mL
Moisture (Karl Fischer)	≤ 0.1%
Trace Metals (ICP-MS)	≤ 10 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.