Description

Tris(Dimethylamino)Silane is a highly reactive organosilicon compound, primarily used as a versatile precursor in advanced material synthesis. Its value lies in its ability to introduce silicon and nitrogen functionalities under mild conditions, enabling precise control in deposition and surface modification processes. This chemical is essential for manufacturers and R&D facilities in the semiconductor, specialty chemical, and nanotechnology sectors seeking high-purity intermediates for thin-film coatings and polymer synthesis.

Application

• Semiconductor Manufacturing: Key precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD) of silicon nitride (SiN) and silicon carbonitride (SiCN) thin films for electronic devices.
• Surface Functionalization: Used as a silylating agent to modify surface properties of silica, metals, and polymers, enhancing adhesion, hydrophobicity, or providing reactive sites.
• Polymer & Resin Synthesis: Serves as a monomer or cross-linking agent in the production of specialty silicones, polycarbosilazanes, and other inorganic-organic hybrid polymers.
• Catalyst & Ligand Synthesis: Employed in the preparation of nitrogen-donor ligands and as a reagent for synthesizing organometallic catalysts.
• Nanomaterial Production: Acts as a silicon source in the sol-gel process and other bottom-up synthesis routes for creating silicon-based nanoparticles and nanostructures.
• Pharmaceutical Intermediates: Utilized in the synthesis of complex molecules where silicon incorporation is required for drug discovery and development.

Basic Information

Product Name	Tris(Dimethylamino)Silane
CAS No.	15112-89-7
Molecular Formula	C6H21N3Si
Molecular Weight	163.34 g/mol
Synonyms	Tris(dimethylamino)silane; Silane, tris(dimethylamino)-; N,N-Dimethyl-1,1,1-tris(dimethylamino)silane; Tris(N,N-dimethylamino)silane; TDMS; (Dimethylamino)trimethylsilane (related); Hexamethyldisilazane precursor; HMDS precursor; Silicon tris(dimethylamide)
EINECS	239-158-3

Quality Control

Our Tris(Dimethylamino)Silane is produced and handled under strict quality management protocols to ensure batch-to-batch consistency and high purity. Each lot undergoes comprehensive analytical testing, including GC, NMR, and Karl Fischer titration, to confirm identity, potency, and impurity profiles. A Certificate of Analysis (COA) detailing all test results is provided with every shipment to support your quality assurance and regulatory needs.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, well-ventilated area at temperatures between 2°C and 8°C (refrigerated) or as specified for the specific grade. This product is hygroscopic (moisture-sensitive) and highly volatile. Containers must be kept tightly sealed under an inert atmosphere (argon or nitrogen) to prevent degradation and moisture uptake. Keep away from heat, sparks, and open flame.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Assay (GC)	≥ 98.0%
Water Content (KF)	≤ 0.1%
Density (at 20°C)	0.83 - 0.87 g/mL
Refractive Index (n20D)	1.420 - 1.430
Related Impurities (GC)	≤ 2.0% total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.