Description

Tris(Dimethylamino)Chlorosilane is a highly reactive organosilicon compound, primarily used as a versatile silylating agent and a key precursor in advanced material synthesis. Its value lies in its ability to introduce the (dimethylamino)silyl group, facilitating surface modification, polymer cross-linking, and the creation of silicon-based protective coatings. This chemical is essential for manufacturers and R&D laboratories in the semiconductor, pharmaceutical, and specialty polymer industries seeking to enhance material properties or develop novel silicon-containing molecules.

Application

• Semiconductor Manufacturing: As a vapor-phase precursor for depositing silicon nitride (SiN) or silicon carbonitride (SiCN) thin films in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes.
• Surface Modification Agent: For silylating glass, silica, and other metal oxide surfaces to alter hydrophobicity, improve adhesion, or provide reactive sites for further functionalization.
• Polymer & Resin Chemistry: Acting as a cross-linking agent or chain extender in the synthesis of silicones, polyimides, and other high-performance polymers.
• Pharmaceutical Intermediates: Utilized in the protection of hydroxyl groups during complex multi-step synthetic routes for active pharmaceutical ingredients (APIs).
• Catalyst & Ligand Synthesis: Serving as a building block for creating novel nitrogen-donor ligands and organosilicon catalysts used in organic synthesis.
• Nano-material Fabrication: As a coupling agent in the functionalization of nanoparticles like silica or quantum dots for tailored dispersion and compatibility.

Basic Information

Product Name	Tris(Dimethylamino)Chlorosilane
CAS No.	13307-05-6
Molecular Formula	C6H19ClN3Si
Molecular Weight	196.78 g/mol
Synonyms	Chlorotris(dimethylamino)silane; Tris(dimethylamino)silyl chloride; N,N,N',N',N'',N''-Hexamethylsilazanium chloride; (Dimethylamino)trichlorosilane (common misnomer); TDMACS; SiCl(NMe2)3; Chlorotris(dimethylamino)silicon
EINECS	Contact for details

Quality Control

Our Tris(Dimethylamino)Chlorosilane is produced under stringent conditions to ensure batch-to-batch consistency and high purity, meeting the exacting requirements of electronic and synthetic applications. Quality is verified through a comprehensive suite of analytical techniques including GC, NMR, and Karl Fischer titration. A Certificate of Analysis (COA) detailing purity, identity, and impurity profiles is provided with every shipment to support your quality assurance protocols.

Storage

Preserve in a tightly closed container, protected from light. Due to its highly volatile and hygroscopic nature, this product must be stored under a dry, inert atmosphere (argon or nitrogen) in a cool, well-ventilated area. Recommended storage temperature is 2-8°C to minimize degradation and maintain stability. Keep away from moisture, strong acids, and strong bases.

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms to structure
Assay (GC)	≥ 98.0%
Chloride Content	17.8 - 18.2 %
Water Content (Karl Fischer)	≤ 0.1%
Density (at 20°C)	0.98 - 1.02 g/mL
Refractive Index (n20D)	1.435 - 1.445

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.