Description

Trichlorogermane is a highly reactive organometallic compound and a key germanium precursor. This compound is essential for the controlled deposition of high-purity germanium and germanium-containing thin films in advanced electronics. It is primarily utilized by manufacturers in the semiconductor, photovoltaics, and specialty glass industries for applications requiring precise material engineering.

Application

• Chemical Vapor Deposition (CVD) & Atomic Layer Deposition (ALD): A critical precursor for depositing germanium (Ge) and germanium-based films on semiconductor wafers.
• Semiconductor Manufacturing: Used in the fabrication of high-mobility transistors, infrared optics, and advanced microelectronic components.
• Photovoltaics: Serves as a source material for germanium layers in high-efficiency multi-junction solar cells.
• Specialty Glass & Optics: Employed in the production of germanium-doped silica glass for optical fibers with specific refractive index profiles.
• Catalysis Research: Acts as a catalyst or catalyst precursor in specialized organic synthesis and polymerization reactions.
• Material Science R&D: A fundamental building block for synthesizing novel germanium-containing polymers, clusters, and nanomaterials.

Basic Information

Product Name	Trichlorogermane
CAS No.	1184-65-2
Molecular Formula	Cl3GeH
Molecular Weight	180.06 g/mol
Synonyms	Germanium Chlorohydride; Germanium Trichlorohydride; Chlorogermane; Trichlorogermanium Hydride; Hydrogen Trichlorogermanate; GeH3Cl (common notation); HGeCl3
EINECS	214-658-2

Quality Control

Our Trichlorogermane is produced and handled under stringent quality management systems to ensure batch-to-batch consistency and high purity for demanding electronic applications. Each lot is accompanied by a comprehensive Certificate of Analysis (COA) detailing key parameters such as assay, metallic impurities, and chlorosilane content. We support customer requirements for semiconductor-grade specifications and can provide material traceability documentation.

Storage

Preserve in a tightly closed container, protected from light. Store in a cool, dry, well-ventilated area away from incompatible materials such as strong bases, oxidizing agents, and moisture. Due to its highly volatile and moisture-sensitive nature, it is recommended to store under an inert atmosphere (e.g., nitrogen or argon) at room temperature (15-25°C).

Specification

Item	Specification
Appearance	Colorless to pale yellow liquid
Identification (IR)	Conforms
Assay (GC)	≥ 99.0% (min)
Chlorosilane Impurities (GC)	≤ 0.5% (max)
Metallic Impurities (ICP-MS)	Contact for details

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.