Description

Molybdenum Hexafluoride is an inorganic compound primarily used as a gaseous precursor in advanced material deposition processes. Its high volatility and reactivity make it a critical material for creating ultra-thin, high-performance molybdenum and molybdenum-containing films. This product is essential for manufacturers in the semiconductor, optics, and specialty glass industries seeking precise and reliable chemical vapor deposition (CVD) and atomic layer deposition (ALD) sources. We supply high-purity Molybdenum Hexafluoride CAS NO 7783-77-9 to meet the stringent demands of global high-tech manufacturing.

Application

• Semiconductor Manufacturing: As a key precursor for the chemical vapor deposition (CVD) and atomic layer deposition (ALD) of molybdenum metal films and molybdenum silicide contacts/interconnects in integrated circuits.
• Optical Coatings: Used in the production of reflective and anti-reflective coatings on lenses, mirrors, and optical components for lasers and precision instruments.
• Specialty Glass & Ceramics: Employed in surface modification and the creation of diffusion barriers or conductive layers on glass and advanced ceramic substrates.
• Nuclear Industry: Serves in isotopic separation processes and as a feed material in certain nuclear fuel cycle operations.
• Research & Development: Utilized in academic and industrial labs for materials science research, including the synthesis of novel molybdenum compounds and nanomaterials.
• Doping Agent: Acts as a fluorine and molybdenum source for doping semiconductors and other electronic materials to alter their electrical properties.

Basic Information

Product Name	Molybdenum Hexafluoride
CAS No.	7783-77-9
Molecular Formula	MoF6
Molecular Weight	209.93 g/mol
Synonyms	Molybdenum(VI) fluoride; Molybdenum fluoride (MoF6); Hexafluoromolybdenum; Molybdenum fluoride; Molybdenum hexafluoride gas
EINECS	232-026-5

Quality Control

Our Molybdenum Hexafluoride is produced and handled under strict quality management systems to ensure batch-to-batch consistency and high purity suitable for sensitive deposition processes. Each lot is analyzed to confirm critical parameters such as purity and metallic impurities. A Certificate of Analysis (COA) detailing specific test results is provided with every shipment. We can support compliance requirements for global markets, including REACH.

Storage

Preserve in a tightly closed, specially passivated container, protected from light. Store in a cool, well-ventilated area, away from heat, ignition sources, and incompatible materials such as water, strong alkalis, and organic compounds. Due to its highly volatile and gaseous nature under standard conditions, cylinders must be secured upright and handled using appropriate pressure-rated equipment. Keep container valves tightly closed when not in use.

Specification

Item	Specification
Appearance	Colorless to pale yellow gas / volatile liquid
Assay (MoF6)	≥ 99.9%
Identification (IR)	Conforms
Water (H2O)	≤ 10 ppm
Other Metallic Impurities (ICP-MS)	≤ 50 ppm total

Note: Specifications can be tailored. Please contact us for the detailed technical data sheet of a specific grade.